Model: Boc Edwards Auto 306
Facility: Nanoscale Characterization Facility
Function: The Auto 306 FL400 Thin Film Deposition System is set up for sequential evaporation of up to four materials without breaking vacuum. The pumping system incorporates a 540-liter/sec turbo molecular pump backed by an XDS10 dry running primary pump. A rotary work holder is fitted to the chamber top plate. Film thickness is monitored using a Sigma SQM160 quartz crystal film thickness deposition monitor with digital display of deposition rate and deposition thickness. There is the capability to control up to 2 source shutters automatically and close the electromagnetic source shutter when pre-programmed termination thickness values are achieved. Substrate heating is via 500W Quartz lamp heater assembly with lamp.